TMHD Precursors for Optical Coatings
High-purity halide-free oxide deposition for AR and filter coatings
For optical coating engineers depositing ZrO₂ and rare-earth oxide films by ALD/CVD
≥99%
Assay Purity
28+
TMHD Metal Complexes
Halide-Free
No F/Cl Contamination
US-Made
Domestic Supply
Photonic integrated circuits and metamaterial coatings require conformal, high-purity oxide films on complex 3D geometries. Mironova’s halide-free TMHD precursors enable ALD deposition of rare-earth oxides (Er₂O₃, Gd₂O₃, Y₂O₃) with sub-nanometer thickness control and no halide-induced absorption losses.
Challenges & Solutions
Your Challenge. Our Answer.
We understand the specific problems you face — and we built solutions for each one.
The Problem
Halide contamination from chloride precursors creates absorption sites that degrade optical performance in AR and filter coatings
Mironova’s Answer
TMHD precursors are entirely halide-free — no Cl or F contamination. Stoichiometric, high-transparency oxide films.
The Problem
Precursor instability in heated delivery lines leads to particle generation and coating defects
Mironova’s Answer
TMHD ligands provide exceptional thermal stability during transport, minimizing particulate contamination
Published Research
Published Evidence
Key findings from peer-reviewed literature relevant to your application.
High-Purity ZrO₂ Films
Zr(TMHD)₄/O₃ ALD produces stoichiometric ZrO₂ with <0.5 at.% C and H impurities — suitable for optical-grade coatings.
Putkonen et al., J. Mater. Chem. 2001
Halide-Free Advantage
Halide precursors leave 1–3 at.% residual Cl that creates absorption sites in optical films. TMHD eliminates this pathway.
Park et al., J. Phys. Chem. C 2016
Market Context
Photonic Integration Demands Conformal Oxide Films
Photonic integrated circuits (PICs) and metamaterial optical coatings require conformal, high-quality oxide films on complex 3D geometries where traditional sputtering and sol-gel methods struggle. ALD-deposited rare-earth oxides (Er₂O₃, Gd₂O₃, Y₂O₃) enable waveguide amplifiers, optical signal processing, and quantum communication applications. Photonic integration is a rapidly growing market as data center and telecom infrastructure shifts toward photonics-based solutions.
Yole; LightCounting; Mironova analysis
High
PIC materials growth rate
ALD
Conformal deposition advantage
Product Catalog
Recommended Products
The specific products from our catalog that match your application.
Application Notes
Optical Coating ALD Parameters
Why Mironova
Your Advantage with Mironova
Rare-Earth Oxide Expertise
Er(TMHD)₃, Gd(TMHD)₃, and Y-based TMHD complexes for ALD-deposited optical waveguides, gain media, and high-refractive-index coatings.
Conformal 3D Coverage
ALD provides uniform film thickness on complex photonic geometries — trenches, pillars, and curved surfaces where line-of-sight methods fail.
Halide-Free Deposition
TMHD precursors eliminate Cl and F contamination that can increase optical absorption losses in waveguide and coating applications.
Custom Precursor Design
Need a specific metal-TMHD complex not in our catalog? We synthesize custom precursors with analytical characterization matched to your process requirements.
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FAQ
Frequently Asked Questions
Common technical questions about this product line, answered by our scientific team.
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Related Resources
Technical data, product specifications, and application guidance.