Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)gadolinium(III)
Also known as: Gd(TMHD)₃, Gadolinium(III) TMHD, Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)gadolinium, Gd(thd)₃
High-purity gadolinium beta-diketonate precursor for CVD and ALD applications. Ideal for depositing gadolinium oxide and gadolinium-doped thin films used in...
Chemical Structure

Product Information
CAS Number
14768-15-1
Molecular Formula
C₃₃H₅₇GdO₆
Molecular Weight
757.01 g/mol
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Product Documents
Safety Data Sheet (SDS)
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Product Specification
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Certificate of Analysis
Provided with order
Overview
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)gadolinium(III), commonly abbreviated as Gd(TMHD)₃, is a rare-earth beta-diketonate complex used as a precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) of gadolinium oxide (Gd₂O₃) and gadolinium-containing thin films. Its high molecular symmetry and bulky TMHD ligands provide favorable volatility and clean thermal decomposition, making it a reliable choice for precise rare-earth film deposition.
Key Advantages
Gd(TMHD)₃ offers several distinct advantages for thin film deposition:
- High Volatility: Sublimes cleanly at moderate temperatures compatible with standard CVD/ALD systems
- Thermal Stability: Decomposes cleanly, yielding high-purity Gd₂O₃ films
- Rare-Earth Precision: Enables accurate Gd doping in oxide matrices for dielectric and luminescence tuning
- Air Stability: More handleable than many organometallic rare-earth compounds
- High Purity Available: Electronic and optical-grade material for demanding applications
Applications
High-k Dielectrics
Gd₂O₃ and Gd-doped HfO₂ or ZrO₂ films deposited from Gd(TMHD)₃ are explored as next-generation high-k gate dielectrics in advanced CMOS logic and memory devices, leveraging gadolinium's high dielectric constant.
Rare-Earth Phosphors & Luminescent Coatings
Gadolinium oxide thin films serve as host matrices for rare-earth-doped phosphors used in display technologies, scintillators, and solid-state lighting, where Gd(TMHD)₃ enables precise stoichiometric control.
MRI Contrast & Biomedical Coatings
Gadolinium-containing coatings produced via vapor deposition techniques are investigated for MRI contrast-enhancing surfaces and biomedical device functionalization.
Magneto-Optical Devices
Gd-containing thin films exhibit interesting magneto-optical properties exploited in optical isolators, spatial light modulators, and data storage media.
Manufacturing Capabilities
We offer Gd(TMHD)₃ from research quantities (25g) to production scale with consistent quality. Custom packaging under inert atmosphere available for air-sensitive handling requirements.
Important Safety Information
Warning: This compound should be handled by qualified professionals in a laboratory environment. Store under inert atmosphere to prevent hydrolysis. Use appropriate PPE including gloves, safety glasses, and lab coat. Gadolinium compounds should be handled with care — refer to SDS for complete safety information including toxicological data.
Related Resources
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