Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III)

Overview

Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III), abbreviated Y(TMHD)₃, is an yttrium beta-diketonate complex used as a precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) of yttrium oxide (Y₂O₃) and yttria-containing composite films such as yttria-stabilized zirconia (YSZ). The TMHD ligand framework provides the volatility and thermal stability needed for reliable vapor-phase yttrium delivery across a broad range of deposition processes.

Key Advantages

• High Purity: ≥99.0% with controlled rare-earth impurity levels critical for YSZ electrolyte performance
• Established in YSZ Co-deposition: Routinely combined with Zr(TMHD)₄ for precise yttria doping of zirconia films
• Good Sublimation Characteristics: Compatible with standard bubbler and solid-source ALD/CVD delivery
• Clean Decomposition: Yields Y₂O₃ films with low carbon and halide contamination
• Inert Atmosphere Packaging: Sealed to prevent moisture uptake during storage and shipping

Applications

Yttria-Stabilized Zirconia (YSZ)

Y(TMHD)₃ co-deposited with Zr(TMHD)₄ is the classic CVD/ALD route to YSZ thin films — the gold-standard solid electrolyte for solid oxide fuel cells (SOFCs) and oxygen sensors, where precise 8–10 mol% yttria doping is required to stabilize the cubic fluorite phase.

Thermal Barrier Coatings (TBC)

Y₂O₃-stabilized ZrO₂ deposited from Y(TMHD)₃/Zr(TMHD)₄ mixtures provides thermal barrier coatings on turbine components and aerospace structures, exploiting the low thermal conductivity and phase stability of YSZ at elevated temperatures.

High-k Dielectrics

Y₂O₃ films and Y-doped HfO₂ dielectrics deposited from Y(TMHD)₃ are investigated as high-k gate dielectrics in advanced CMOS logic nodes, where yttrium doping modulates the dielectric constant and crystallization temperature.

Optical Coatings

Y₂O₃ is a wide-bandgap, optically transparent oxide used in UV-transmitting optical coatings, anti-reflection layers, and protective films on optical components for UV lithography and laser applications.

Manufacturing Capabilities

We offer Y(TMHD)₃ from research quantities (500g) to production scale with consistent quality. Custom packaging under inert atmosphere available. Glass packaging required for all orders.

Important Safety Information

Warning: This compound should be handled by qualified professionals in a laboratory environment. Store under inert atmosphere to prevent hydrolysis. Use appropriate PPE including gloves, safety glasses, and lab coat. Refer to SDS for complete safety information.